Vierneusel B, Tremmel S, Wartzack S (2015)
Publication Language: English
Publication Type: Journal article, Original article
Publication year: 2015
Publisher: American Vacuum Society
Book Volume: 33
Pages Range: 1-6
Journal Issue: 6
DOI: 10.1116/1.4926383
APA:
Vierneusel, B., Tremmel, S., & Wartzack, S. (2015). Monte Carlo simulation of the MoS2 sputtering process and the influence of the normalized momentum on residual stresses. Journal of Vacuum Science & Technology A, 33(6), 1-6. https://doi.org/10.1116/1.4926383
MLA:
Vierneusel, Bernd, Stephan Tremmel, and Sandro Wartzack. "Monte Carlo simulation of the MoS2 sputtering process and the influence of the normalized momentum on residual stresses." Journal of Vacuum Science & Technology A 33.6 (2015): 1-6.
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