High-resolution optical probing of SAW and leaky SAW structures
Holm A, Wallner P, Ruile W, Weigel R (1997)
Publication Type: Conference contribution
Publication year: 1997
Book Volume: 1
Pages Range: 153-156
Conference Proceedings Title: IEEE Ultrasonics Symposium Proceedings
Event location: Toronto, Ontario
ISBN: 978-0-7803-4153-1
DOI: 10.1109/ULTSYM.1997.662999
Abstract
A nondestructive high-resolution technique for the optical detection of surface acoustic wave (SAW) devices is presented. The laser probing technique allows for the measurement of the phase and amplitude of microacoustic fields and waves of SAW components in operation. The phase velocity can be determined directly from the measurements with a relative accuracy of up to 1.5.10-5. We present new experimental results of microacoustic wave propagation phenomena including anisotropic and temperature dependent phase velocity υ, diffraction, and attenuation and compare them to full-wave analysis computations. The minimum detectable surface displacement of less than 1 pm/√Hz allows for the detection of different acoustic modes such as Rayleigh waves and leaky SAWs.
Authors with CRIS profile
How to cite
APA:
Holm, A., Wallner, P., Ruile, W., & Weigel, R. (1997). High-resolution optical probing of SAW and leaky SAW structures. In IEEE Ultrasonics Symposium Proceedings (pp. 153-156). Toronto, Ontario, CA.
MLA:
Holm, Andreas, et al. "High-resolution optical probing of SAW and leaky SAW structures." Proceedings of the IEEE Ultrasonics Symposium Proceedings, Toronto, Ontario 1997. 153-156.
BibTeX: Download