Pichler P, Burenkov A, Lorenz J, Kampen C, Frey L (2010)
Publication Status: Published
Publication Type: Journal article, Original article
Publication year: 2010
Book Volume: 518
Pages Range: 2478-2484
Journal Issue: 9
DOI: 10.1016/j.tsf.2009.09.150
APA:
Pichler, P., Burenkov, A., Lorenz, J., Kampen, C., & Frey, L. (2010). Future challenges in CMOS process modeling. Thin Solid Films, 518(9), 2478-2484. https://doi.org/10.1016/j.tsf.2009.09.150
MLA:
Pichler, P., et al. "Future challenges in CMOS process modeling." Thin Solid Films 518.9 (2010): 2478-2484.
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