Lindlein N (2003)
Publication Status: Published
Publication Type: Conference contribution, Conference Contribution
Publication year: 2003
Book Volume: 5180
Pages Range: 253-260
Event location: San Diego, CA
URI: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=1842451871&origin=inward
An interferometrical measurement method is presented for determining the quality of cylindrical micro lenses with a numerical aperture of up to 0.8 in transmitted light. In order to maximize the achievable accuracy, a null test configuration was chosen. The reference cylindrical waves are shaped by computer generated diffractive optical elements (DOEs), which are made by optical or e-beam lithography. The resulting wave front is analyzed by a fiber optic phase-shifting Mach-Zehnder-interferometer or a Shack-Hartmann wave front sensor. Besides the general setup, which is working in the near infrared (NIR), special aspects will be presented concerning the elimination of misalignment aberrations, the complete filtering of parasitic diffraction orders and the generation of an anamorphic optical transformation for increasing the lateral resolution perpendicular to the cylindrical axis. By means of experimental results the possibilities and accuracy of this technique are discussed.
APA:
Lindlein, N. (2003). Null test measurement of high-numerical aperture cylindrical micro lenses in transmitted light. In Philip Stahl H. (Eds.), Proceedings of the Optical Manufacturing and Testing V (pp. 253-260). San Diego, CA.
MLA:
Lindlein, Norbert. "Null test measurement of high-numerical aperture cylindrical micro lenses in transmitted light." Proceedings of the Optical Manufacturing and Testing V, San Diego, CA Ed. Philip Stahl H., 2003. 253-260.
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