Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors

Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H (2004)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 2004

Journal

Microelectronic Engineering Elsevier

Book Volume: 72

Pages Range: 315-320

Event location: Barcelona

DOI: 10.1016/j.mee.2004.01.010

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Lemberger, M., Paskaleva, A., Zürcher, S., Bauer, A., Frey, L., & Ryssel, H. (2004). Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors. Microelectronic Engineering, 72, 315-320. https://doi.org/10.1016/j.mee.2004.01.010

MLA:

Lemberger, Martin, et al. "Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors." Microelectronic Engineering 72 (2004): 315-320.

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