Erdmann A, Fühner T, Evanschitzky P (2010)
Publication Type: Conference contribution, Conference Contribution
Publication year: 2010
Book Volume: 9
Pages Range: 72711E
DOI: 10.1117/12.814119
APA:
Erdmann, A., Fühner, T., & Evanschitzky, P. (2010). Mask diffraction analysis and optimization for EUV masks. (pp. 72711E).
MLA:
Erdmann, Andreas, Tim Fühner, and Peter Evanschitzky. "Mask diffraction analysis and optimization for EUV masks." 2010. 72711E.
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