Miniature interferometers for applications in microtechnology and nanotechnology
Jäger G, Manske E, Hausotte T, Füßl R, Grünwald R, Büchner HJ, Schott W, Dontsov D (2003)
Publication Status: Published
Publication Type: Conference contribution
Publication year: 2003
Journal
Publisher: International Society for Optical Engineering; 1999
Book Volume: 5190
Pages Range: 185-192
Conference Proceedings Title: Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II
Event location: San Diego, California
DOI: 10.1117/12.507906
Abstract
An initial description of the design and operation of compact miniature interferometers that employ fiberoptic lightguides for all of their optical couplings and are suitable for general-purpose use is followed by a metrological analysis of their mode of operation and examples of their broad applicability, based on several typical instrumental setups.
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Germany (DE)How to cite
APA:
Jäger, G., Manske, E., Hausotte, T., Füßl, R., Grünwald, R., Büchner, H.-J.,... Dontsov, D. (2003). Miniature interferometers for applications in microtechnology and nanotechnology. In Proceedings Volume 5190, Recent Developments in Traceable Dimensional Measurements II (pp. 185-192). San Diego, California, US: International Society for Optical Engineering; 1999.
MLA:
Jäger, Gerd, et al. "Miniature interferometers for applications in microtechnology and nanotechnology." Proceedings of the Optical Science and Technology, SPIE's 48th Annual Meeting,, San Diego, California International Society for Optical Engineering; 1999, 2003. 185-192.
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