Keller G, Stals L, Mändl S, Rauschenbach B, Rüde U (2001)
Publication Type: Journal article
Publication year: 2001
Publisher: American Institute of Physics (AIP)
Book Volume: 88
Pages Range: 1111-1117
APA:
Keller, G., Stals, L., Mändl, S., Rauschenbach, B., & Rüde, U. (2001). Simulation of Trench Homogeneity in Plasma Immersion IonImplantation. Journal of Applied Physics, 88, 1111-1117.
MLA:
Keller, G., et al. "Simulation of Trench Homogeneity in Plasma Immersion IonImplantation." Journal of Applied Physics 88 (2001): 1111-1117.
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