Sun Z, Schuler A, Hausotte T (2015)
Publication Language: English
Publication Type: Conference contribution, Abstract of lecture
Publication year: 2015
APA:
Sun, Z., Schuler, A., & Hausotte, T. (2015). Update on a 3D probing system based on electrical near-field interaction for micro- and nano-coordinate metrology. Paper presentation at Micro/Nano Manufacturing Workshop, Teddington, GB.
MLA:
Sun, Zhongyuan, Alexander Schuler, and Tino Hausotte. "Update on a 3D probing system based on electrical near-field interaction for micro- and nano-coordinate metrology." Presented at Micro/Nano Manufacturing Workshop, Teddington 2015.
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