Linz S, Oesterle F, Lindner S, Mann S, Weigel R, Kölpin A (2016)
Publication Language: English
Publication Type: Journal article
Publication year: 2016
Publisher: IEEE
Book Volume: 64
Pages Range: 3918-3926
Journal Issue: 11
DOI: 10.1109/TMTT.2016.2612664
APA:
Linz, S., Oesterle, F., Lindner, S., Mann, S., Weigel, R., & Kölpin, A. (2016). Test Method for Contactless On-wafer MEMS Characterization and Production Monitoring. IEEE Transactions on Microwave Theory and Techniques, 64(11), 3918-3926. https://doi.org/10.1109/TMTT.2016.2612664
MLA:
Linz, Sarah, et al. "Test Method for Contactless On-wafer MEMS Characterization and Production Monitoring." IEEE Transactions on Microwave Theory and Techniques 64.11 (2016): 3918-3926.
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