Determination of Temperature Coefficients of Materials in RF BAW Resonators

Tag A, Bader B, Pitschi M, Wagner KC, Weigel R, Hagelauer AM (2015)


Publication Type: Conference contribution

Publication year: 2015

Publisher: IEEE

Pages Range: 402-405

Conference Proceedings Title: German Microwave Conference

Event location: Nürnberg

DOI: 10.1109/GEMIC.2015.7107838

Abstract

A new, accurate, and fast approach for determining the temperature coefficients of the thin film materials used in RF BAW components has been developed allowing the precise modeling of BAW components at different ambient temperatures. The presented method is based on the investigation of several resonance frequencies of the resonators with different layer-stacks. The problem of determining the temperature coefficients from broadband resonator simulations and measurements was formulated as an overdetermined linear system of equations and solved by using the weighted least square method. The presented approach has been verified by measurements.

Authors with CRIS profile

How to cite

APA:

Tag, A., Bader, B., Pitschi, M., Wagner, K.C., Weigel, R., & Hagelauer, A.M. (2015). Determination of Temperature Coefficients of Materials in RF BAW Resonators. In German Microwave Conference (pp. 402-405). Nürnberg: IEEE.

MLA:

Tag, Andreas, et al. "Determination of Temperature Coefficients of Materials in RF BAW Resonators." Proceedings of the German Microwave Conference (GeMiC), Nürnberg IEEE, 2015. 402-405.

BibTeX: Download