Jäger G, Manske E, Hausotte T, Müller A, Balzer F (2016)
Publication Language: English
Publication Type: Journal article, Review article
Publication year: 2016
Publisher: IOP Publishing
Article Number: 034004
Journal Issue: 4
DOI: 10.1088/2051-672X/4/3/034004
APA:
Jäger, G., Manske, E., Hausotte, T., Müller, A., & Balzer, F. (2016). Nanopositioning and nanomeasuring machine NPMM-200 - a new powerful tool for large-range micro- and nanotechnology. Surface Topography: Metrology and Properties, 4. https://doi.org/10.1088/2051-672X/4/3/034004
MLA:
Jäger, Gerd, et al. "Nanopositioning and nanomeasuring machine NPMM-200 - a new powerful tool for large-range micro- and nanotechnology." Surface Topography: Metrology and Properties 4 (2016).
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