Barium, strontium and bismuth contamination in CMOS processes

Boubekeur H, Mikolajick T, Höpfner J, Dehm C, Pamler W, Steiner J, Kilian G, Kolbesen B, Bauer A, Frey L, Ryssel H (2001)

Publication Status: Published

Publication Type: Authored book, Volume of book series

Publication year: 2001

Publisher: Trans Tech Publications Ltd

Pages Range: 9-14

ISBN: 9783908450573

DOI: 10.4028/www.scientific.net/SSP.76-77.9

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

NaMLab gGmbH DE Germany (DE) Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Boubekeur, H., Mikolajick, T., Höpfner, J., Dehm, C., Pamler, W., Steiner, J.,... Ryssel, H. (2001). Barium, strontium and bismuth contamination in CMOS processes. Trans Tech Publications Ltd.

MLA:

Boubekeur, H., et al. Barium, strontium and bismuth contamination in CMOS processes. Trans Tech Publications Ltd, 2001.

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