Surface Properties and Electrical Characteristics of Rapid Thermal Annealed 4H-SiC

Bauer A, Rambach M, Frey L, Weiss R, Rupp R, Friedrichs P, Schörner R, Peters DP (2003)

Publication Status: Published

Publication Type: Authored book, Volume of book series

Publication year: 2003

Pages Range: 609-612

Event location: Linkoping

URI: https://www.scopus.com/record/display.uri?eid=2-s2.0-18744421066&origin=inward

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Bauer, A., Rambach, M., Frey, L., Weiss, R., Rupp, R., Friedrichs, P.,... Peters, D.P. (2003). Surface Properties and Electrical Characteristics of Rapid Thermal Annealed 4H-SiC.

MLA:

Bauer, Anton, et al. Surface Properties and Electrical Characteristics of Rapid Thermal Annealed 4H-SiC. 2003.

BibTeX: Download