Nanoscale effects in focused ion beam processing

Frey L, Lehrer C, Ryssel H (2003)

Publication Status: Published

Publication Type: Journal article, Review article

Publication year: 2003

Journal

Applied Physics A: Materials Science and Processing Springer Verlag (Germany)

Book Volume: 76

Pages Range: 1017-1023

Journal Issue: 7

DOI: 10.1007/s00339-002-1943-1

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Frey, L., Lehrer, C., & Ryssel, H. (2003). Nanoscale effects in focused ion beam processing. Applied Physics A: Materials Science and Processing, 76(7), 1017-1023. https://doi.org/10.1007/s00339-002-1943-1

MLA:

Frey, Lothar, C. Lehrer, and Heiner Ryssel. "Nanoscale effects in focused ion beam processing." Applied Physics A: Materials Science and Processing 76.7 (2003): 1017-1023.

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