Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H (2005)
Publication Status: Published
Publication Type: Journal article, Original article
Publication year: 2005
Book Volume: 45
Pages Range: 819-822
DOI: 10.1016/j.microrel.2004.11.040
APA:
Lemberger, M., Paskaleva, A., Zürcher, S., Bauer, A., Frey, L., & Ryssel, H. (2005). Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor. Microelectronics Reliability, 45, 819-822. https://doi.org/10.1016/j.microrel.2004.11.040
MLA:
Lemberger, Martin, et al. "Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor." Microelectronics Reliability 45 (2005): 819-822.
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