Schmitt H, Haeublein V, Bauer A, Frey L (2011)
Publication Status: Published
Publication Type: Authored book, Volume of book series
Publication year: 2011
Pages Range: 417-420
Event location: Oslo
ISBN: 9783037850794
DOI: 10.4028/www.scientific.net/MSF.679-680.417
APA:
Schmitt, H., Haeublein, V., Bauer, A., & Frey, L. (2011). Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC.
MLA:
Schmitt, H., et al. Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC. 2011.
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