vom Dorp J, Erlbacher T, Bauer AJ, Ryssel H, Frey L (2011)
Publication Status: Published
Publication Type: Journal article, Original article
Publication year: 2011
Publisher: AVS Science and Technology Society
Book Volume: 29
Journal Issue: 1
DOI: 10.1116/1.3525283
APA:
vom Dorp, J., Erlbacher, T., Bauer, A.J., Ryssel, H., & Frey, L. (2011). Dielectric layers suitable for high voltage integrated trench capacitors. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics, 29(1). https://doi.org/10.1116/1.3525283
MLA:
vom Dorp, Joachim, et al. "Dielectric layers suitable for high voltage integrated trench capacitors." Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics 29.1 (2011).
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