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Maximilian Rumler
List of publications:
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Lehrstuhl für Elektronische Bauelemente
Project Memberships
(1)
Publications
(15)
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Journal article
Journal article
Book chapter / Article in edited volumes
Book chapter / Article in edited volumes
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Authored book
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Translation
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Thesis
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Edited Volume
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Conference contribution
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Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching (2013)
Rommel M, Rumler M, Haas A, Bauer AJ, Frey L
Journal article, Original article
Functional epoxy polymer for direct nano-imprinting of micro-optical elements (2013)
Fader R, Landwehr J, Rumler M, Rommel M, Bauer A, Frey L, Voelkel R, et al.
Journal article, Original article
Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication (2013)
Rumler M, Fader R, Haas A, Rommel M, Bauer A, Frey L
Journal article, Original article
Accuracy of wafer level alignment with substrate conformal imprint lithography (2013)
Fader R, Rommel M, Bauer A, Rumler M, Frey L, Verschuuren MA, Van De Laar R, et al.
Journal article
Melt Depth and Time Variations during Pulsed Laser Thermal Annealing with One and More Pulses, (2013)
Hackenberg M, Rommel M, Rumler M, Lorenz J, Pichler P, Huet K, Negro R, et al.
Book chapter / Article in edited volumes
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