Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)

Research facility


Location: Erlangen, Germany (DE) DE

ISNI: 0000000104810543

ROR: https://ror.org/04q5rka56

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

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To

Abstract

Journal

Local material removal by focused ion beam milling and etching (1995) Lipp S, Frey L, Franz G, Demm E, Petersen S, Ryssel H Journal article, Original article Improved delineation technique for two dimensional dopant profiling (1995) Gong L, Petersen S, Frey L, Ryssel H Journal article, Original article Tribological properties of carbonized photoresist (1991) Oechsner R, Kluge A, Frey L, Ryssel H Journal article, Original article
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