Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)

Research facility


Location: Erlangen, Germany (DE) DE

ISNI: 0000000104810543

ROR: https://ror.org/04q5rka56

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

From
To

Abstract

Journal

Implantation and Annealing of Aluminum in 4H Silicon Carbide (2005) Rambach M, Schmid F, Krieger M, Frey L, Bauer A, Pensl G, Ryssel H Journal article Investigations into the wear of a WL10 ion source (2005) Haeublein V, Sadrawetz S, Frey L, Martinz HP, Ryssel H Journal article, Original article Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor (2005) Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H Journal article, Original article Chemical vapor phase precipitation of new materials for sub 50 nm transistors Chemische Dampfphasenabscheidung von neuen Materialien für Sub-50-nm-Transistoren (2005) Frey L, Bauer A, Ryssel H Journal article, Original article Characterization of interface state densitiesby photocurrent analysis: Comparison of results for different insulator layers (2005) Rommel M, Groß M, Ettinger A, Lemberger M, Bauer A, Frey L, Ryssel H Journal article, Original article Music Genre Estimation from Low Level Audio Features (2004) Hellmuth O, Allamanche E, Herre J, Kastner T, Wistorf R, Lefebvre N Conference contribution, Original article Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors (2004) Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H Journal article, Original article Integration of field emitters into scanning probe microscopy sensors using focused ion and electron beams (2004) Lehrer C, Frey L, Petersen S, Ryssel H, Schäfer M, Sulzbach T Journal article, Original article Modeling of Chemical-Mechanical Polishing on Patterned Wafers as Part of Integrated Topography Process Simulation (2004) Nguyen PH, Lorenz J, Baer E, Ryssel H Conference contribution Investigation of rapid thermal annealed pn-junctions in SiC (2004) Frey L, Rambach M, Weiss R, Bauer A, Ryssel H Authored book, Volume of book series
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