Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)

Research facility


Location: Erlangen, Germany (DE) DE

ISNI: 0000000104810543

ROR: https://ror.org/04q5rka56

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

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To

Abstract

Journal

Dielectric layers suitable for high voltage integrated trench capacitors (2011) vom Dorp J, Erlbacher T, Bauer AJ, Ryssel H, Frey L Journal article, Original article Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy (2011) Yanev V, Rommel M, Bauer AJ, Frey L Journal article, Original article Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application (2010) Hinz J, Bauer AJ, Frey L Journal article A Highly Integrated EMI Filter Using Polymer Bonded Soft Magnetics as Core Material (2010) Egelkraut S, März M, Rauch M, Schletz A, Frey L Conference contribution Light-load efficiency increase in high-frequency integrated DC-DC converters by parallel dynamic width controlling (2010) Lorentz VR, Berberich SEB, März M, Bauer AJ, Ryssel H, Poure P, Braun F Journal article Audio-based Music Structure Analysis (2010) Paulus J, Müller M, Klapuri A Conference contribution Effective work function tuning in high-κ dielectric metal-oxide-semiconductor stacks by fluorine and lanthanide doping (2010) Fet A, Haeublein V, Bauer AJ, Ryssel H, Frey L Journal article The Impact of Helium Co-Implantation on Hydrogen Induced Donor Profiles in Float Zone Silicon (2010) Laven J, Job R, Schulze HJ, Niedernostheide FJ, Häublein V, Schulze H, Schustereder W, et al. Journal article Modeling of the effective work function instability in metal/high-κ dielectric stacks (2010) Fet A, Haeublein V, Bauer AJ, Ryssel H, Frey L Journal article Full wafer microlens replication by UV imprint lithography (2010) Schmitt H, Rommel M, Bauer A, Frey L, Bich A, Eisner M, Voelkel R, Hornung M Journal article