Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)

Research facility


Location: Erlangen, Germany (DE) DE

ISNI: 0000000104810543

ROR: https://ror.org/04q5rka56

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

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To

Abstract

Journal

Imaging effects of particles on the surface of EUV mask and wafer (2024) Semaan R, Bottiglieri G, Erdmann A, Rispens G, de Winter L, Beekmans S Conference contribution Increasing 4H-SiC Trench Depth by Improving the Dry Etch Selectivity towards the Oxide Hard Mask (2024) Rusch O, Brueckner K, Erlbacher T Book chapter / Article in edited volumes Unconventional conductivity increase in multilayer black phosphorus (2023) Kolesnik-Gray M, Meingast L, Siebert M, Unbehaun T, Huf T, Ellrott G, Abellan Saez G, et al. Journal article Author Correction: Highly accurate determination of heterogeneously stacked Van-der-Waals materials by optical microspectroscopy (Scientific Reports, (2020), 10, 1, (13676), 10.1038/s41598-020-70580-3) (2023) Hutzler A, Fritsch B, Matthus CD, Jank MP, Rommel M Journal article, Erratum Operational experience with a liquid organic hydrogen carrier (LOHC) system for bidirectional storage of electrical energy over 725 h (2023) Geiling J, Wagner L, Auer F, Ortner F, Nuß A, Seyfried R, Stammberger F, et al. Journal article Ultra-low resistance Au-free V/Al/Ti/TiN ohmic contacts for AlGaN/GaN HEMTs (2023) Garbe V, Seidel S, Schmid A, Bläß U, Meissner E, Heitmann J Journal article Stiffness influence on particle separation in polydimethylsiloxane-based deterministic lateral displacement devices (2023) Marhenke J, Dirnecker T, Vogel N, Rommel M Journal article Goethite Mineral Dissolution to Probe the Chemistry of Radiolytic Water in Liquid-Phase Transmission Electron Microscopy (2023) Couasnon T, Fritsch B, Jank MP, Blukis R, Hutzler A, Benning LG Journal article Reverse engineering of the hydrogen system of a commercial fuel cell vehicle (2023) Meindl M, Öchsner R, Geiling J, März M Conference contribution Design proposal and optimization potential for an electric drive motor in a 50 PAX hybrid-electric regional aircraft application (2023) Meindl M, Liu X, Hilpert F, Marciello V, Di Stasio M, März M Conference contribution, Conference Contribution
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