Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)

Research facility


Location: Erlangen, Germany (DE) DE

ISNI: 0000000104810543

ROR: https://ror.org/04q5rka56

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

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To

Abstract

Journal

Influence of ion implantation in SiC on the channel mobility in lateral n-channel MOSFETs (2013) Strenger C, Uhnevionak V, Burenkov A, Bauer A, Pichler P, Erlbacher T, Ryssel H, Frey L Conference contribution, Conference Contribution Functional epoxy polymer for direct nano-imprinting of micro-optical elements (2013) Fader R, Landwehr J, Rumler M, Rommel M, Bauer A, Frey L, Voelkel R, et al. Journal article, Original article Characterization of diverse gate oxides on 4H-SiC 3D trench-MOS structures (2013) Banzhaf C, Grieb M, Trautmann A, Bauer A, Frey L Authored book, Volume of book series Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication (2013) Rumler M, Fader R, Haas A, Rommel M, Bauer A, Frey L Journal article, Original article Accuracy of wafer level alignment with substrate conformal imprint lithography (2013) Fader R, Rommel M, Bauer A, Rumler M, Frey L, Verschuuren MA, Van De Laar R, et al. Journal article Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts (2013) Adelmann B, Hürner A, Schlegel T, Bauer A, Frey L, Hellmann R Other publication type Electrical impact of the aluminum p-implant annealing on lateral MOSFET transistors on 4H-SiC n-epi (2013) Noll S, Scholten D, Grieb M, Bauer A, Frey L Authored book, Volume of book series Comparative study of n-LIGBT and n-LDMOS structures on 4H-SiC (2013) Häublein V, Temmel G, Mitlehner H, Rattmann G, Strenger C, Hürner A, Bauer A, et al. Authored book, Volume of book series Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction (2013) Rommel M, Jambreck JD, Lemberger M, Bauer A, Frey L, Murakami K, Richter C, Weinzierl P Journal article, Original article Conduction mechanisms in thermal nitride and dry gate oxides grown on 4H-SiC (2013) Ouennoughi Z, Strenger C, Bourouba F, Haeublein V, Ryssel H, Frey L Journal article, other
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