SÜSS MicroTec AG
Industry / private company
Location:
Garching,
Germany (DE)
ISNI: -
Accuracy of wafer level alignment with substrate conformal imprint lithography (2013)
Fader R, Rommel M, Bauer A, Rumler M, Frey L, Verschuuren MA, Van De Laar R, et al.
Journal article
Novel organic polymer for UV-enhanced substrate conformal imprint lithography (2012)
Fader R, Schmitt H, Rommel M, Bauer AJ, Frey L, Ji R, Hornung M, et al.
Journal article, Original article