SÜSS MicroTec AG

Industry / private company

Location: Garching, Germany (DE)

ISNI: -

Publications

(2)

Accuracy of wafer level alignment with substrate conformal imprint lithography (2013) Fader R, Rommel M, Bauer A, Rumler M, Frey L, Verschuuren MA, Van De Laar R, et al. Journal article Novel organic polymer for UV-enhanced substrate conformal imprint lithography (2012) Fader R, Schmitt H, Rommel M, Bauer AJ, Frey L, Ji R, Hornung M, et al. Journal article, Original article