Eidgenössische Materialprüfungs- und Forschungsanstalt (Empa) / Swiss Federal Laboratories for Materials Science & Technology
Research facility
Location:
Dübendorf,
Switzerland (CH)
ISNI: 0000000123313059
ROR: https://ror.org/02x681a42
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A practical, self-catalytic, atomic layer deposition of silicon dioxide (2008)
Bachmann J, Zierold R, Chong YT, Hauert R, Sturm C, Schmidt-Grund R, Rheinlaender B, et al.
Journal article, Original article