Osaka University / 大阪大学

University / College


Location: Suita, Japan (JP) JP

ISNI: 0000000403733971

ROR: https://ror.org/035t8zc32

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

Publication year

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Abstract

Journal

Microanalysis of masklessly fabricated micro structures using nuclear microprobe (1998) Park Y, Takai M, Nagai T, Kishimoto T, Seidl A, Lehrer C, Frey L, Ryssel H Journal article, Original article Microanalysis of impurity contamination in masklessly etched area using focused ion beam (1997) Park Y, Takai M, Nagai T, Kishimoto T, Lehrer C, Frey L, Ryssel H Journal article, Original article
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