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Lehrstuhl für Elektronische Bauelemente
Friedrich-Alexander-Universität Erlangen-Nürnberg
Technische Fakultät
Department Elektrotechnik-Elektronik-Informationstechnik
Overview
Publications
(533)
Research Grants
(58)
Research Fields
(9)
Types of publications
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Journal article
Journal article
Book chapter / Article in edited volumes
Book chapter / Article in edited volumes
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Authored book
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Translation
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Thesis
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Other publication type
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Unpublished / Preprint
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A novel delineation technique for 2D-profiling of dopants in crystalline silicon (1993)
Gong L, Frey L, Bogen S, Ryssel H
Journal article, Original article
Analysis of microstructured samples by focused ion beam sample preparation (1993)
Frey L, Ergele W, Falter T, Gong L, Ryssel H
Journal article, Original article
High energy ion implantation for semiconductor application at Fraunhofer-AIS, Erlangen (1992)
Frey L, Bogen S, Gong L, Jung W, Ryssel H, Gyulai J
Journal article, Original article
End-of-range disorder influenced by inherent oxygen in silicon (1992)
Antos L, Gyulai J, Khanh N, Frey L
Journal article, Original article
Characterization of metal impurities in silicon-on-insulator material (1992)
Frey L, Kroninger F, Streckfusse N, Ryssel H, Margail J
Journal article, Original article
Analysis of trace metals on silicon surfaces (1992)
Streckfusse N, Frey L, Zielonka G, Kroninger F, Ryzlewicz C, Ryssel H
Journal article, Original article
Simulation of high energy implantation profiles in crystalline silicon (1992)
Gong L, Bogen S, Frey L, Jung W, Ryssel H
Journal article, other
Tribological properties of carbonized photoresist (1991)
Oechsner R, Kluge A, Frey L, Ryssel H
Journal article, Original article
Effect of oxygen on the formation of end-of-range disorder in implantation amorphized silicon (1991)
Gyulai J, Frey L, Ryssel H, Khanh N
Journal article, Original article
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