Lehrstuhl für Elektronische Bauelemente

Field emitter array fabricated using focused ion and electron beam induced reaction (2000) Yavas O, Ochiai C, Takai M, Park Y, Lehrer C, Lipp S, Frey L, et al. Journal article, Original article AFM and STM investigation of carbon nanotubes produced by high energy ion irradiation of graphite (1999) Biró L, Márk G, Gyulai J, Havancsák K, Lipp S, Lehrer C, Frey L, Ryssel H Journal article, Original article MOCVD of ferroelectric thin films (1999) Schmidt C, Lehnert W, Leistner T, Frey L, Ryssel H Conference contribution, Original article Implantation of nitrogen into polysilicon to suppress boron penetration through the gate oxide (1999) Bauer A, Mayer P, Frey L, Haeublein V, Ryssel H Conference contribution, Conference Contribution Forming nitrided gate oxides by nitrogen implantation into the substrate before gate oxidation by RTO (1999) Bauer A, Mayer P, Frey L, Haeublein V, Ryssel H Conference contribution, Conference Contribution Carbon nanotubes produced by high energy (E > 100 MeV), heavy ion irradiation of graphite (1999) Biró L, Szabó B, Márk G, Gyulai J, Havancsák K, Kürti J, Dunlop A, et al. Journal article, Original article Scanning probe method investigation of carbon nanotubes produced by high energy ion irradiation of graphite (1999) Biró L, Márk G, Gyulai J, Rozlosnik N, Kürti J, Szabó B, Frey L, Ryssel H Journal article, Original article Impurity incorporation during beam assisted processing analyzed using nuclear microprobe (1999) Park Y, Takai M, Lehrer C, Frey L, Ryssel H Journal article, Original article Investigation of Cu films by focused ion beam induced deposition using nuclear microprobe (1999) Park Y, Takai M, Lehrer C, Frey L, Ryssel H Journal article, Original article Comparison of beam-induced deposition using ion microprobe (1999) Park Y, Nagai T, Takai M, Lehrer C, Frey L, Ryssel H Journal article, Review article