Lehrstuhl für Elektronische Bauelemente

Electrical Characterization of Zirconium Silicate Films Obtained from Novel MOCVD Precursors (2003) Paskaleva A, Lemberger M, Zürcher S, Bauer A, Frey L, Ryssel H Conference contribution Surface Properties and Electrical Characteristics of Rapid Thermal Annealed 4H-SiC (2003) Bauer A, Rambach M, Frey L, Weiss R, Rupp R, Friedrichs P, Schörner R, Peters DP Authored book, Volume of book series Nanoscale effects in focused ion beam processing (2003) Frey L, Lehrer C, Ryssel H Journal article, Review article Materials processing by focused ion beams for TEM sample preparation and nanostructuring Materialbearbeitung mittels fokussierter ionenstrahlen zur TEM-probenpräparation und nanostrukturierung (2003) Frey L, Lehrer C Journal article, Original article Development of enhanced depth-resolution technique for shallow dopant profiles (2002) Fujita M, Tajima J, Nakagawa T, Abo S, Kinomura A, Pászti F, Takai M, et al. Journal article, Original article MOCVD of titanium dioxide on the basis of new precursors (2002) Leistner T, Lehmbacher K, Härter P, Schmidt C, Bauer A, Frey L, Ryssel H Journal article, Original article Investigation of lanthanum contamination from a lanthanated tungsten ion source (2002) Häublein V, Frey L, Ryssel H, Walser H Conference contribution, Conference Contribution Investigation of implantation-induced defects in thin gate oxides using low field tunnel currents (2002) Jank M, Frey L, Bauer A, Ryssel H Conference contribution, Conference Contribution Influence of photoresist pattern on charging damage during high current ion implantation (2002) Dirnecker T, Ruf A, Frey L, Beyer A, Bauer A, Henke D, Ryssel H Conference contribution, Conference Contribution ENCOTION - A new simulation tool for energetic contamination analysis (2002) Häublein V, Frey L, Ryssel H Conference contribution, Conference Contribution