Lehrstuhl für Elektronische Bauelemente

Physical and Electrical Properties of Thin High-k HfxTiySizO Film With varying Hf to Ti Ratios (2004) Paskaleva A, Bauer A, Lemberger M, Zürcher S Conference contribution, Conference Contribution Genetic Algorithms to Improve Mask and Illumination Geometries in Lithographic Imaging Systems (2004) Fühner T, Erdmann A, Farkas R, Tollkühn B, Kókai G Conference contribution, Original article Modeling of the influence of Schottky barrier inhomogeneities on SiC diode characteristics (2004) Weiss R, Frey L, Ryssel H Authored book, Volume of book series Investigation of rapid thermal annealed pn-junctions in SiC (2004) Frey L, Rambach M, Weiss R, Bauer A, Ryssel H Authored book, Volume of book series Trench sidewall doping for lateral power devices (2003) Berberich SE, Bauer A, Frey L, Ryssel H Conference contribution, Conference Contribution Influence of Antenna Shape and Resist Patterns on Charging Damage During Ion Implantation (2003) Dirnecker T, Frey L, Bauer A, Ryssel H, Ruf A, Henke D, Beyer A Conference contribution Characterization of charging damage in plasma doping (2003) Henke D, Walther S, Weemann J, Dirnecker T, Ruf A, Beyer A, Lee K Conference contribution Will Darwins's Law Help Us to Improve Our Resist Models? (2003) Tollkühn B, Fühner T, Matiut D, Erdmann A, Semmler A, Küchler B, Kókai G Conference contribution, Original article Optimization of one-and two dimensional masks in the optical lithography (2003) Farkas R, Kókai G, Erdmann A, Fühner T, Tollkühn B Conference contribution, Original article Mask and Source Optimization for Lithographic Imaging Systems (2003) Erdmann A, Farkas R, Fühner T, Tollkühn B, Kókai G Conference contribution, Original article