Lehrstuhl für Elektronische Bauelemente

Impurity Conduction in Silicon Carbide (2007) Krieger M, Semmelroth K, Weber HB, Pensl G, Rambach M, Frey L Journal article Active Fuse (2006) Berberich SEB, März M, Beuer S, Ryssel H Conference contribution Nanoscale morphology and photoemission of arsenic implanted germanium films (2006) Peto G, Khanh N, Horvath Z, Molnar G, Gyulai J, Kotai E, Guczi L, Frey L Journal article The impact of mass resolution on molybdenum contamination for B, P, BF 2, and As implantations (2006) Häublein V, Frey L, Ryssel H Conference contribution, Conference Contribution Simulation of ion beam direct structuring for 3D nanoimprint template fabrication (2006) Lugstein A, Frey L, Bertagnolli E, Platzgummer E, Biedermann A, Langfischer H, Eder-Kapl S, et al. Journal article, Original article Ion implantation and annealing for an efficient N-doping of TiO2 nanotubes (2006) Ghicov A, Macák J, Tsuchiya H, Kunze J, Häublein V, Frey L, Schmuki P Journal article, Original article Extracting activation and compensation ratio from aluminum implanted 4H-SiC by modeling of resistivity measurements (2006) Rambach M, Frey L, Bauer A, Ryssel H Authored book, Volume of book series Untersuchung von Aufladungseffekten bei der Ionenimplantation (2006) Dirnecker T, Ryssel H Authored book Creation of E-Learning Content for Microelectronics Manufacturing (2006) Oechsner R, Pfeffer M, Pfitzner L, Ryssel H, Beer K, Boldin M, de Mey B, et al. Conference contribution Well Design in a Bulk CMOS Technology with Low Mask Count (2006) Jank M, Kandziora C, Frey L, Ryssel H Conference contribution