Lehrstuhl für Elektronische Bauelemente

Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition (2009) Mueller J, Boescke TS, Schroeder U, Reinicke M, Oberbeck L, Zhou D, Weinreich W, et al. Journal article, Original article Detailed arsenic concentration profiles at Si/SiO2 interfaces (2008) Pei L, Duscher G, Steen C, Pichler P, Ryssel H, Napolitani E, De Salvador D, et al. Journal article, Original article Polymer bonded soft magnetic particles for planar inductive devices (2008) Egelkraut S, März M, Ryssel H Conference contribution Detailed Carrier Lifetime Analysis of Iron-Contaminated Boron-doped Silicon by Comparison of Simulation and Measurement (2008) Rommel M, Bauer A, Ryssel H Journal article Modeling of the Diffusion and Activation of Arsenic in Silicon Including Clustering and Precipitation (2008) Martinez Limia A, Pichler P, Steen C, Paul S, Lerch W Conference contribution Self-aligned growth of organometallic layers for nonvolatile memories: Comparison of liquid-phase and vapor-phase deposition (2008) Erlbacher T, Jank MPM, Ryssel H, Frey L, Engl R, Walter A, Sezi R, Dehm C Journal article Cathodoluminescence characterization of organic semiconductor materials for light emitting device applications (2007) Wellmann P, Karl U, Kleber S, Schmitt H Journal article UV nanoimprint materials: Surface energies, residual layers, and imprint quality (2007) Schmitt H, Frey L, Ryssel H, Rommel M, Lehrer C Journal article Application of a memetic algorithm to the calibration of micro-lithography (2007) Christoph D, Fühner T, Tollkühn B, Erdmann A, Kókai G Book chapter / Article in edited volumes MOCVD of Hafnium Silicate Films Obtained from a Single-Source Precusor on Silicon and Germanium for Gate-Dielectric Applications (2007) Lemberger M, Schön F, Dirnecker T, Jank M, Frey L, Ryssel H, Paskaleva A, et al. Journal article