Lehrstuhl für Elektronische Bauelemente

Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks (2011) Fet A, Haeublein V, Bauer AJ, Ryssel H, Frey L Journal article, Original article Ferroelectric Zr0.5Hf0.5O2 thin films for nonvolatile memory applications (2011) Mueller J, Boescke TS, Braeuhaus D, Schroeder U, Boettger U, Sundqvist J, Kuecher P, et al. Journal article, Original article Conversion efficiency of radiation damage profiles into hydrogenrelated donor profiles (2011) Laven JG, Job R, Schustereder W, Hans Joachim S, Niedernostheide FJ, Schulze H, Frey L Authored book, Volume of book series Comparative study on metallization and passivation materials for high temperature sensor applications (2011) Daves W, Krauss A, Le-Huu M, Kronmüller S, Haeublein V, Bauer A, Frey L Authored book, Volume of book series Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications (2011) Daves W, Krauss A, Behnel N, Haeublein V, Bauer A, Frey L Journal article, Original article 4H-SiC n-MOSFET logic circuits for high temperature operation (2011) Frey L, Le-Huu M, Grieb M, Schrey F, Schmitt H, Haeublein V, Bauer A, Ryssel H Authored book, Volume of book series Dielectric layers suitable for high voltage integrated trench capacitors (2011) vom Dorp J, Erlbacher T, Bauer AJ, Ryssel H, Frey L Journal article, Original article Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy (2011) Yanev V, Rommel M, Bauer AJ, Frey L Journal article, Original article Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application (2010) Hinz J, Bauer AJ, Frey L Journal article A Highly Integrated EMI Filter Using Polymer Bonded Soft Magnetics as Core Material (2010) Egelkraut S, März M, Rauch M, Schletz A, Frey L Conference contribution