Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics

ISSN: 2166-2754
eISSN: 0734-211X
Publisher: American Vacuum Society

Publications (11)

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Abstract

Dielectric layers suitable for high voltage integrated trench capacitors (2011) vom Dorp J, Erlbacher T, Bauer AJ, Ryssel H, Frey L Journal article, Original article
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