FAU.de
Deutsch
Login
Home
Publications
Research Grants
Inventions & Patents
Awards
Additional Research Activities
Faculties & Institutions
Research Areas
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics
ISSN:
2166-2754
eISSN:
0734-211X
Publisher:
American Vacuum Society
Publications (11)
Types of publications
Journal article
Journal article
Unpublished / Preprint
Unpublished / Preprint
Publication year
From
To
Abstract
Filters (inactive)
Dielectric layers suitable for high voltage integrated trench capacitors (2011)
vom Dorp J, Erlbacher T, Bauer AJ, Ryssel H, Frey L
Journal article, Original article
‹
1
2
›