Journal of Vacuum Science & Technology B
Journal Abbreviation: J VAC SCI TECHNOL B
ISSN: 1071-1023
Publisher: American Institute of Physics (AIP)
Publications (14)
Field emitter array fabricated using focused ion and electron beam induced reaction (2000)
Yavas O, Ochiai C, Takai M, Park Y, Lehrer C, Lipp S, Frey L, et al.
Journal article, Original article
Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiOx) deposition (1996)
Lipp S, Frey L, Lehrer C, Frank B, Demm E, Pauthner S, Ryssel H
Journal article, Original article
Investigations on the topology of structures milled and etched by focused ion beams (1996)
Lipp S, Frey L, Lehrer C, Frank B, Demm E, Ryssel H
Journal article, Original article
New-surface dopant passivation after wet-chemical preparation of Si (111):H surfaces (1996)
Ley L, Ristein J
Journal article