Microelectronics Reliability
Journal Abbreviation: MICROELECTRON RELIAB
ISSN: 0026-2714
Publisher: Elsevier
Publications (23)
Electrical Characterization of Zirconium Silicate Films Obtained from Novel MOCVD Precursors (2003)
Paskaleva A, Lemberger M, Zürcher S, Bauer A, Frey L, Ryssel H
Conference contribution
Electrical reliability aspects of through the gate implanted MOS structures with thin oxides (2001)
Jank MPM, Lemberger M, Bauer A, Frey L, Ryssel H
Journal article, Original article
A comparison of focused ion beam and electron beam induced deposition processes (1996)
Lipp S, Frey L, Lehrer C, Demm E, Pauthner S, Ryssel H
Journal article, Original article
