Radiation Effects and Defects in Solids

Journal Abbreviation: RADIAT EFF DEFECT S
ISSN: 1042-0150
Publisher: Taylor & Francis: STM, Behavioural Science and Public Health Titles / Taylor & Francis

Publications (5)

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Unpublished / Preprint

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Abstract

Distortion of sims profiles due to ion beam mixing: Shallow arsenic implants in silicon (1998) Montandon C, Bourenkov A, Frey L, Pichler P, Biersack JP Journal article, Original article Distortion of sims profiles due to ion beam mixing (1997) Saggio M, Montandon C, Bourenkov A, Frey L, Pichler P Journal article, Original article Deep implants for semiconductor device applications (1996) Frey L, Bogen S, Herden M, Ryssel H Journal article, Original article Athermal effects in ion implanted layers (1994) Gyulai J, Ryssel H, Biró L, Frey L, Kuki A, Kormány T, Serfozo G, Khanh N Journal article, Original article Analytical description of high energy implantation profiles of boron and phosphorus into crystalline silicon (1994) Gong L, Bogen S, Frey L, Jung W, Ryssel H Journal article, Original article