Microelectronic Engineering
Journal Abbreviation: MICROELECTRON ENG
ISSN: 0167-9317
Publisher: Elsevier
Publications (38)
Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors (2004)
Lemberger M, Paskaleva A, Zürcher S, Bauer A, Frey L, Ryssel H
Journal article, Original article
Modeling of Chemical-Mechanical Polishing on Patterned Wafers as Part of Integrated Topography Process Simulation (2004)
Nguyen PH, Lorenz J, Baer E, Ryssel H
Conference contribution
Fabrication of silicon aperture probes for scanning near-field optical microscopy by focused ion beam nano machining (2001)
Lehrer C, Frey L, Petersen S, Sulzbach T, Ohlsson O, Dziomba T, Danzebrink H, Ryssel H
Journal article, Original article
Ti-Silicide Formation During Isochronal Annealing Followed by in situ Ellipsometry (2001)
Hundhausen M, Ley L
Journal article
Investigation of surface acoustic waves on LiNbO3, quartz, and LiTaO3 by laser probing (1996)
Holm A, Stürzer Q, Xu Y, Weigel R
Journal article
Optical measurement system for the determination of acoustic phase velocities with high accuracy (1994)
Holm A, Soelkner G, Ruile W, Weigel R
Journal article
Analysis of microstructured samples by focused ion beam sample preparation (1993)
Frey L, Ergele W, Falter T, Gong L, Ryssel H
Journal article, Original article
Simulation of high energy implantation profiles in crystalline silicon (1992)
Gong L, Bogen S, Frey L, Jung W, Ryssel H
Journal article, other