Microelectronic Engineering
Journal Abbreviation: MICROELECTRON ENG
ISSN: 0167-9317
Publisher: Elsevier
Publications (38)
Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching (2013)
Rommel M, Rumler M, Haas A, Bauer AJ, Frey L
Journal article, Original article
Functional epoxy polymer for direct nano-imprinting of micro-optical elements (2013)
Fader R, Landwehr J, Rumler M, Rommel M, Bauer A, Frey L, Voelkel R, et al.
Journal article, Original article
Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography (2012)
Schmitt H, Duempelmann P, Fader R, Rommel M, Bauer AJ, Frey L, Brehm M, Kraft A
Journal article, Original article
Novel organic polymer for UV-enhanced substrate conformal imprint lithography (2012)
Fader R, Schmitt H, Rommel M, Bauer AJ, Frey L, Ji R, Hornung M, et al.
Journal article, Original article
Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures (2012)
Rommel M, Bauer AJ, Frey L
Journal article, Original article
Germanium substrate loss during thermal processing (2011)
Kaiser RJ, Koffel S, Pichler P, Bauer AJ, Amon B, Frey L, Ryssel H
Journal article, Original article
Experiments and simulation of the diffusion and activation of the n-type dopants P, As, and Sb implanted into germanium (2011)
Koffel S, Kaiser RJ, Bauer AJ, Amon B, Pichler P, Lorenz J, Frey L, et al.
Journal article, Original article
Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy (2011)
Jambreck JD, Yanev V, Schmitt H, Rommel M, Bauer AJ, Frey L
Journal article, Original article
Full wafer microlens replication by UV imprint lithography (2010)
Schmitt H, Rommel M, Bauer A, Frey L, Bich A, Eisner M, Voelkel R, Hornung M
Journal article
Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations (2010)
Rommel M, Jambreck JD, Ebm C, Platzgummer E, Bauer AJ, Frey L
Journal article, Original article