Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Journal Abbreviation: NUCL INSTRUM METH B
ISSN: 0168-583X
Publisher: Elsevier
Publications (34)
A novel delineation technique for 2D-profiling of dopants in crystalline silicon (1993)
Gong L, Frey L, Bogen S, Ryssel H
Journal article, Original article
High energy ion implantation for semiconductor application at Fraunhofer-AIS, Erlangen (1992)
Frey L, Bogen S, Gong L, Jung W, Ryssel H, Gyulai J
Journal article, Original article
End-of-range disorder influenced by inherent oxygen in silicon (1992)
Antos L, Gyulai J, Khanh N, Frey L
Journal article, Original article
Tribological properties of carbonized photoresist (1991)
Oechsner R, Kluge A, Frey L, Ryssel H
Journal article, Original article