Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Journal Abbreviation: NUCL INSTRUM METH B
ISSN: 0168-583X
Publisher: Elsevier
Publications (34)
In-depth damage distribution by scanning probe methods in targets irradiated with 200 MeV ions (1997)
Biró L, Gyulai J, Havancsák K, Didyk A, Frey L, Ryssel H
Journal article, Original article
Model for the electronic stopping of channeled ions in silicon around the stopping power maximum (1995)
Frey L, Ryssel H, Bogen S, Hobler G, Simionescu A
Journal article, Original article
Local material removal by focused ion beam milling and etching (1995)
Lipp S, Frey L, Franz G, Demm E, Petersen S, Ryssel H
Journal article, Original article
Improved delineation technique for two dimensional dopant profiling (1995)
Gong L, Petersen S, Frey L, Ryssel H
Journal article, Original article
Comparison of retrograde and conventional p-wells in regard of latch-up susceptibility (1995)
Bogen S, Körber K, Gong L, Frey L, Ryssel H
Journal article, Original article
Investigation of the effect of altered defect structure produced by photon assisted implantation on the diffusion of As in silicon during thermal annealing (1994)
Biró L, Gyulai J, Bogen S, Frey L, Ryssel H
Journal article, Original article
Practical aspects of ion beam analysis of semiconductor structures (1994)
Frey L, Pichler P, Kasko I, Thies I, Lipp S, Streckfuss N, Gong L, Ryssel H
Journal article, Original article
Photon assisted implantation (PAI) (1993)
Biró L, Gyulai J, Ryssel H, Frey L, Kormány T, Tuan N, Horváth z
Journal article, Original article
High energy implantation of 10B and 11B into (100) silicon in channel and in random direction (1993)
Bogen S, Gong L, Frey L, Ryssel H
Journal article, Original article
Effect of ion-beam mixing temperature on cobalt silicide formation (1993)
Kasko I, Dehm C, Frey L, Ryssel H
Journal article, Original article