New Developments in Laser Processing of Silicon Devices (2003) Dirscherl M, Eßer G Conference contribution Ubiquitous coherence - boon and bale of the optical metrologist (2003) Häusler G Journal article Miniature interferometers for applications in microtechnology and nanotechnology (2003) Jäger G, Manske E, Hausotte T, Füßl R, Grünwald R, Büchner HJ, Schott W, Dontsov D Conference contribution RF-sensor for a local position measurement system (2003) Stelzer A, Fischer A, Weinberger F, Vossiek M Conference contribution Innovative optical components and their impact on future transmission systems (2003) Schmauß B, Striegler A, Meißner M Conference contribution Four-port on Wafer Measurement of Coupled Transmission Lines on LTCC (2003) Ziegler C, Nisznansky M, Schmidt LP, Hocke R, Wohlgemuth O Conference contribution Broadband Electrical Design and Modelling of Packages Integrated in LTCC-Substrate (2003) Nisznansky M, Ziegler C, Schmidt LP, Hocke R, Wohlgemuth O Conference contribution Generation of functional structures by laser pyrolysis of polysilazane (2002) Krauß HJ, Otto A Conference contribution Lateral Shearing Interferometer for Phase Shift Mask Measurement at 193 nm (2002) Lindlein N Journal article Nanopositioning and - measuring technique (2002) Jäger G, Manske E, Hausotte T, Büchner HJ, Grünwald R Conference contribution